n gear consisting of a shaft with screw thread (the worm) that meshes with a toothed wheel (the worm wheel); changes the direction of the axis of rotary motion
Four-Axis Gantry has vacuum-compatible design. Designed for secondary silicon wafer processing while exposed to vacuum, 4-axis (XYθZ) positioning gantry features X and Y axes driven by brushless linear motor DR Positioning Stages. While θ axis is worm gear stage driven by rotary stepper motor under closed loop control in conjunction with arc-segmented linear encoder, Z axis linear motion is achieved using voice coil positioning ...
July 2, 2013 - ThomasNet